Hybrid structure of multi-layer substrates and manufacture method thereof

ABSTRACT

A hybrid structure of multi-layer substrates comprises a first multi-layer substrate and a second multi-layer substrate. The first multi-layer substrate stacks up first metal layers, first dielectric layers alternately and has VIAs. A border district of a first metal layer connects with a border district of the corresponding first dielectric layer. The border districts are separated from adjacent first metal layers and adjacent first dielectric layers. The second multi-layer substrate stacks up second metal layers and second dielectric layers alternately. A border district of a second metal layer connects with a border district of the corresponding second dielectric layer. The border districts are separated from adjacent second metal layers and adjacent second dielectric layers. The VIAs are located at the border districts of the first dielectric layers and each VIA has electric conductor therein to connect one first metal layer with one second metal layer.

CROSS REFERENCE TO RELATED APPLICATION

This is a division of a U.S. patent application Ser. No. 11/856,858,filed on Sep. 18, 2007.

FIELD OF THE INVENTION

The present invention generally relates to a hybrid structure ofmulti-layer substrates and the manufacture method thereof, and moreparticularly to a hybrid structure of different kinds of multi-layersubstrates and the manufacture method thereof which can be applied todifferent kinds of chip devices.

BACKGROUND OF THE INVENTION

Miniaturization for all electronic productions is an unavoidable trendin this modern world. While the scales of the semiconductor chipscontinuously get smaller, the scale of the related technology forpackaging needs to be microminiaturized to follow the scale of thesemiconductor chip is also unavoidable. Today, because the integrationof integrated circuits has been greatly increased, using a multi-layersubstrate to package different kinds of chip devices is necessary tointegrate different kinds of functions to obtain a high performanceintegration system consequentially. For example, an integration systemmay comprise many kinds of chip devices, such as a logic circuitcomponent, a memory, an analog component, an optoelectronic component, amicroelectric mechanical component or a luminous component. Generally,the kinds of chip devices need to connect with each other through oneshared package substrate (such as a mainboard) according to prior arts.That is, if one chip device can be connected to another chip devicedirectly, the integration of package can be increased tomicrominiaturize the whole system further. A Stacked Chip Scale Package(SCSP) is proposed to package several chips nowadays, is called a3D-package. However, such a 3D-package concept is limited in a rigidsystem package.

For meeting the variety of modern electronic production, a flexiblemulti-layer substrate or a non-flat substrate can be used for highdensity package. According to prior arts, the connection for twoindependent multi-layer substrates is established through connectors orthrough one shared package substrate. Therefore, for corresponding to aflexible or irregular package to increase integration complexity andreducing package volume, even applying for a System-In-Package,connection becomes a great topic and a challenge for the packagetechnology today.

Therefore, development of a hybrid structure of multi-layer substratesand manufacture method thereof to connect different kinds of chipdevices directly without a shared package substrate, this will reducethe package volume of the whole system to increase the packageintegration and to provide a flexible package. Accordingly,microminiaturization of whole system can be achieved.

SUMMARY OF THE INVENTION

An objective of the present invention is to provide a hybrid structureof multi-layer substrates and manufacture method thereof to connectdifferent kinds of chip devices directly.

Another objective of the present invention is to provide a hybridstructure of multi-layer substrates and manufacture method thereof toreduce package volume of the whole system for increasing the packageintegration and provide a flexible package.

The hybrid structure of multi-layer substrates of the present inventioncomprises at least a first multi-layer substrate and a secondmulti-layer substrate. The first multi-layer substrate stacks up aplurality of first metal layers, a plurality of first dielectric layersalternately and has a plurality of VIAs. A border district of at leastone first metal layer connects with a border district of thecorresponding first dielectric layer of the first metal layer. Theborder districts are separated from adjacent first metal layers andadjacent first dielectric layers. The second multi-layer substratestacks up a plurality of second metal layers and a plurality of seconddielectric layers alternately. A border district of at least one secondmetal layer connects with a border district of the corresponding seconddielectric layer of the second metal layer. The border districts areseparated from adjacent second metal layers and adjacent seconddielectric layers. The VIAs are located at the border districts of thefirst dielectric layers, and each VIA has electric conductor therein.The VIAs connects the first metal layer with the second metal layer toform a connection section.

After forming the first metal layers on the first dielectric layers, aninterface adhesion enhancing process is implemented on rest surfaces ofthe first metal layers and the corresponding first dielectric layers toincrease adhesion intensity on the rest surfaces. Alternatively, aninterface adhesion weakening process is implemented on the borderdistricts to decrease adhesion intensity thereon. The hybrid structureof multi-layer substrates according to the present invention may furthercomprise a first chip device positioned on a first outer surface of thefirst multi-layer substrate. The hybrid structure of multi-layersubstrates may further comprise a second chip device positioned on afirst outer surface of the second multi-layer substrate. An interfaceadhesion enhancing process is also implemented on the first chip device,the second chip device and respective corresponding first outer surfacesto increase adhesion intensity therebetween. The hybrid structure ofmulti-layer substrates may further comprise a third substrate to connectthe first multi-layer substrate or the second multi-layer substrate. Thethird substrate can also be used to connect the first chip device or thesecond chip device. The first multi-layer substrate, the secondmulti-layer substrate and the third substrate all can be a flexiblemulti-layer interconnection substrate.

Moreover, the present invention also provides a manufacture method of ahybrid structure of multi-layer substrates for connecting chip devices.The manufacture method of the present invention comprises steps of:

separating a border district of at least one metal layer and thecorresponding dielectric layer from adjacent metal layers and adjacentdielectric layers for each multi-layer substrate; and

connecting electric conductor in a VIA of a first metal layer of onemulti-layer substrate with a separated border district of a metal layerof another multi-layer substrate to form a connection section.

The manufacture method of the present invention comprises a step offorming the multi-layer substrates on the chip devices and a step ofimplementing an interface adhesion enhancing process on the chip devicesduring the step of forming the multi-layer substrates. The step offorming the multi-layer substrates further comprises steps of:

(A) coating a dielectric layer on the surfaces of the chip devices;

(B) forming a plurality of VIAs at the dielectric layer and a metallayer on the dielectric layer;

(C) coating another dielectric layer;

(D) repeating step (B) and step (C) to form the multi-layer substrates.

The manufacture method of the present invention may further comprise astep of implementing an interface adhesion enhancing process on restsurface of the metal layer and the corresponding dielectric layer exceptthe border districts to increase adhesion intensity on the rest surfacesbefore coating the another dielectric layer during the step (C).Alternatively, the aforesaid step can be replaced by a step ofimplementing an interface adhesion weakening process on the borderdistricts to decrease adhesion intensity thereon.

After the connecting step, the manufacture method of the presentinvention further comprises a step of connecting the multi-layersubstrates or the chip devices with a third substrate.

According to the hybrid structure of the multi-layer substrates andmanufacture method of the present invention, directly connectingdifferent kinds of chip devices can be realized. Moreover, the presentinvention can reduce the package volume of the whole system forincreasing the package integration and provide a flexible package forapplication of a flexible electronic system.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 illustrates a profile drawing of a hybrid structure ofmulti-layer substrates according to a first embodiment of the presentinvention;

FIG. 2 illustrates a profile drawing of a hybrid structure ofmulti-layer substrates according to a first embodiment of the presentinvention wherein the interface adhesion enhancing process implementingareas are indicated with bold lines;

FIG. 3A and FIG. 3B illustrate a flowchart of a manufacture method ofthe hybrid structure of multi-layer substrates according to the presentinvention; and

FIG. 4 illustrates profile drawing of a hybrid structure of multi-layersubstrates according to a second embodiment of the present inventionwherein the connection of one second metal layer and the correspondingsecond dielectric layer is retained as dividing the second multi-layersubstrate and the third multi-layer substrate.

DETAILED DESCRIPTION OF THE INVENTION

Please refer to FIG. 1, which illustrates a profile drawing of a hybridstructure of multi-layer substrates according to a first embodiment ofthe present invention. The hybrid structure of multi-layer substratescomprises a first multi-layer substrate 300, a second multi-layersubstrate 400 and VIAs 1, 2, 3 formed in the first multi-layer substrate300. A first chip device 100 is positioned on a first outer surface ofthe first multi-layer substrate 300. A second chip device 200 ispositioned on a first outer surface of the second multi-layer substrate400. Either the first chip device 100 or the second chip device 200 canbe a logic circuit component, a memory, an analog component, anoptoelectronic component, a microelectric mechanic component, a luminouscomponent or any other components. The hybrid structure of multi-layersubstrates may further comprise a third substrate (not shown inFigures). The third substrate can be employed to connect the firstmulti-layer substrate 300 or the second multi-layer substrate 400 via apin 410 or Ball Mount 420. Alternatively, the third substrate also canbe employed to connect the first chip device 100 or the second chipdevice 200.

The first multi-layer substrate 300 comprises first dielectric layers10, 13, 16, 19 and first metal layers 11, 14, 17. The second multi-layersubstrate 400 comprises second dielectric layers 20, 23, 26, 29 andsecond metal layers 21, 24, 27. The first chip device 100 is connectedwith the first dielectric layer 10 of the first multi-layer substrate300. The second chip device 200 is connected with the second dielectriclayer 20.

As shown in FIG. 1, regarding the first multi-layer substrate 300, theborder districts of the first metal layer 11 and the first dielectriclayer 13 are connected therewith, the border districts of the firstmetal layer 14 and the first dielectric layer 16 connected therewith andthe border districts of the first metal layer 17 and the firstdielectric layer 19 connected therewith are separated from adjacentfirst metal layers and adjacent first dielectric layers. Similarly,regarding the second multi-layer substrate 400, the border districts ofthe second metal layer 21 and the second dielectric layer 23 areconnected therewith, the border districts of the second metal layer 24and the second dielectric layer 26 connected therewith and the borderdistricts of the second metal layer 27 and the second dielectric layer29 connected therewith are separated from adjacent second metal layersand adjacent second dielectric layers respectively. Besides, the VIAs 1,2, 3 are located at the border districts of the first dielectric layers13, 16, 19 respectively.

The VIAs 1, 2, 3 have electric conductors including electric conductionmaterial therein. The electric conductors in the VIAs 1, 2, 3 can beformed when the first metal layers 11, 14, 17 are formed by usingLithography Etching, Electroplating or Metal Lift-off, that is, the VIAs1, 2, 3 fill up with the electric conduction material when the firstmetal layers 11, 14, 17 are formed. Therefore, the electric conductionmaterial is the same metal element of the first metal layers 11, 14, 17.However, the electric conductors are not limited to aforementioned butthe process of forming the electric conductors can be independent of theprocess of forming the first metal layers 11, 14, 17. The electricconduction material in the VIAs 1, 2, 3 can be different from the metalelement of the first metal layers 11, 14, 17 according to differentdemands. For example, the VIAs 1, 2, 3 can fill up with the electricconductors after separating the border districts of the first metallayers and the first dielectric layers connected therewith from adjacentfirst metal layers and adjacent first dielectric layers of the firstmulti-layer substrate 300.

The separated border districts of the second metal layers 21, 24, 27 ofthe second multi-layer substrate 400 are connected with the electricconductors in the VIAs 1, 2, 3 located at the border districts of thefirst dielectric layers 13, 16, 19 respectively when the secondmulti-layer substrate 400 is going to connect with the first multi-layersubstrate 300 to form a connection section 120 of the hybrid structureof multi-layer substrates as shown in FIG. 1. The interconnection methodof bonders 4, 5, 6 can use bondings such as tin finish bonding, Eutecticbonding, Anisotropic Conductive Film bonding, Gold-Gold bonding orGold-Copper bonding. By such interconnection, the second metal layers21, 24, 27 and the first metal layers 11, 14, 17 are interconnected andby such hybrid structure of multi-layer substrates, a directinterconnection of the first multi-layer substrate 300 and the secondmulti-layer substrate 400 can be realized. Comparing with prior arts,the direct interconnection of the first multi-layer substrate 300 andthe second multi-layer substrate 400 is achieved by utilizing theseparated border districts of the multi-layer substrates. Therefore,package integration can be increased and package volume of the wholesystem can be reduced and provide effectively a flexible package forapplication of a flexible electronic system.

In the first embodiment of the present invention, the VIAs 1, 2, 3 atthe first dielectric layers 13, 16, 19 are connected with the secondmetal layers 21, 24, 27 one by one but the interconnection is notlimited thereto. Selective interconnection or one by many can also beillustrated.

Please refer to FIG. 2, which illustrates a profile drawing of a hybridstructure of multi-layer substrates according to a first embodiment ofthe present invention wherein the interface adhesion enhancing processimplementing areas are indicated with bold lines. An interface adhesionenhancing process can be implemented between the first chip device 100and the first multi-layer substrate 300, or between the second chipdevice 200 and the second multi-layer substrate 400 to increase adhesionintensities between the first chip device 100, the second chip device200 and the first outer surfaces of the first multi-layer substrate 300and the second multi-layer substrate 400 (the adhesion intensity betweendielectric layer and silicon). Moreover, an interface adhesion enhancingprocess is also implemented on rest surfaces of the first metal layers,the second metal layers, the first dielectric layers and the seconddielectric layers except the separated border districts to increaseadhesion intensity on the aforesaid rest surfaces. Significantly, aninterface adhesion enhancing process is not implemented on the borderdistricts between the first dielectric layer 13 and the first metallayer 14, between the first dielectric layer 16 and the first metallayer 17, between the first dielectric layer 16 and the first metallayer 17, between the second dielectric layer 23 and the second metallayer 24 or between the second dielectric layer 26 and the second metallayer 27. Alternatively, an interface adhesion weakening process can beimplemented between those border district. Because the interfaceadhesion enhancing process is implemented on the rest surfaces exceptthe border districts between the dielectric layers, the border districtswhich are not implemented with the interface adhesion enhancing processor implemented with the interface adhesion weakening process can beeasily separated from the other adjacent border districts of layers.

The way to separate the border districts of the multi-layer substratescan be using two adhesive tapes (such as UV tape) to stick on the firstouter surface and the second outer surface of the first multi-layersubstrate 300 or the second multi-layer substrate 400, first; and then,rending the two tapes to separate the border districts which are notimplemented with the interface adhesion enhancing process. Repeating thesticking and rending procedures, the border districts of the layerswhich are not implemented with the interface adhesion enhancing processcan be separated. However, the metal layers 11, 14, 17, 21, 24, 27 areconnected with the dielectric layers 13, 16, 19, 23, 26, 29. With aconcept of selective interface adhesion enhancing process between thedielectric layers, the hybrid structure of the first multi-layersubstrate 300 and the second multi-layer substrate 400 can beaccomplished. For example, material of the dielectric layers ispolyimide; the aforesaid interface adhesion enhancing process can be anoxygen or argon plasma process.

As aforementioned, the third substrate can be use to connect the firstouter surface of the first multi-layer substrate 300 or the first outersurface of the second multi-layer substrate 400. The connect method canbe BGA package, LGA package, PGA package or Wire Bond Package. In a casethat the first multi-layer substrate 300, the second multi-layersubstrate 400 and the third substrate are all flexible multi-layerinterconnection substrates, the hybrid structure of the multi-layersubstrates of the present invention can provide a flexible package forthose aforesaid flexible multi-layer interconnection substrates.

Please refer to FIG. 3A and FIG. 3B which illustrate a flowchart of amanufacture method of the hybrid structure of multi-layer substratesaccording to the present invention. The manufacture method of thepresent invention comprises steps of:

Step a. providing a device wafer including a plurality of chip devices;

Step b. implementing an interface adhesion enhancing process 110, 210 onthe chip devices to increase adhesion intensity on surfaces of the firstchip devices and then coating dielectric layers 10, 20;

Step c. forming a plurality of VIAs at predetermined positions 9 andmetal layers 11, 21 on the dielectric layer at predetermined areas ofthe metal layers;

Step d. coating another dielectric layers 13, 23;

Step e. repeating the step c and the step d to form the multi-layersubstrates;

Step f. dividing the chip devices and corresponding multi-layersubstrates along edges of the border districts (vertical lines, d2, d3shown in Figures for Step d. and Step e.);

Step g. removing parts 100-1 of the device wafer without chip devices;

Step h. removing a border district 10-1 of the dielectric layer 10adjacent to the chip device 100 to reveal a border district of thecorresponding metal layer 11 of the dielectric layer 10 by using laseror separating dielectric layer;

Step i. separating a border district of at least one metal layerconnecting with a border district of the corresponding dielectric layerfrom adjacent metal layers and adjacent dielectric layers for eachmulti-layer substrate;

Step j. connecting electric conductor in a VIA of a first metal layer ofthe first multi-layer substrate 300 with a separated border district ofa metal layer of the second multi-layer substrate 400 by using tinfinish bonding, Eutectic bonding, Anisotropic Conductive Film bonding,Gold-Gold bonding or Gold-Copper bonding to complete the hybridstructure of multi-layer substrates; and

Step k. connecting the second outer surfaces of the first multi-layersubstrate 300 and the second multi-layer substrate 400 with a thirdsubstrate (not shown in FIG. 3B). As aforementioned, the connectingmethod can be BGA package, LGA package, PGA package or Wire BondPackage. Although the manufacture method of the first multi-layersubstrate 300 is illustrated in FIG. 3A and FIG. 3B, the manufacturemethod of the second multi-layer substrate 400 or the third substrate issimilar thereto.

Alternatively, the present invention can also provide a carrier(including no chip devices) instead of the device wafer. Accordingly,the step f. of dividing chip the devices can be omitted and the wholecarrier will be removed during the step g. Then, first and the secondchip devices may be connected to the first and second multi-layersubstrates 300, 400 in the step j. or other steps.

The manufacture method of the present invention may further comprises astep of implementing an interface adhesion enhancing process 12, 22 onrest surface of the dielectric layer 10, 20 and the metal layer 11, 21except a border district thereof to increase adhesion intensity on therest surface before coating the another dielectric layer 13, 23 duringthe step d. Alternatively, the aforesaid step can be replaced by a stepof implementing an interface adhesion weakening process on the borderdistricts to decrease adhesion intensity thereon.

Please refer to FIG. 4, which illustrates profile drawing of a hybridstructure of multi-layer substrates according to a second embodiment ofthe present invention wherein the connection of a second metal layer 27and the corresponding second dielectric layer 29 is retained as dividingthe second multi-layer substrate and the third multi-layer substrate.Please also refer to the figures for Step d. and Step e. shown in FIG.3A about the manufacture method of the first multi-layer substrate 300according to the present invention. The manufacture method of the secondmulti-layer substrate 400 is similar to thereto. Supposing that thesecond chip device 200 and the second multi-layer substrate 400 arebetween the vertical lines d3, d4; a third chip device and the thirdmulti-layer substrate 500 are between the vertical lines d2, d3, thedifference in Step f. from the first embodiment is dividing the chipdevices and corresponding multi-layer substrates along the verticallines d2, d4 completely but dividing along the vertical line d5 from thechip device stops at second metal layer 27 and the dielectric 29;dividing along the vertical line d3 from the chip device stops at secondmetal layer 21 and the dielectric 23. Then, the second metal layers andthe second dielectric layers between the vertical lines d3, d5 areseparated. Accordingly, the second multi-layer substrate 400 and thethird multi-layer substrate 500 own the second metal layer 27 and thedielectric 29 together. Similarly as described in the first embodiment,the hybrid structure of the first multi-layer substrate 300 and thesecond multi-layer substrate 400 remains. Therefore, the presentinvention provides a concept having more possibilities of multipleinterconnections for multi-layer substrates.

In conclusion, the present invention provides a hybrid structure ofmulti-layer substrates and manufacture method thereof to connectdifferent kinds of chip devices directly through the hybrid structure ofthe respective multi-layer substrates connecting the chip devicestherewith and without a shared substrate. The hybrid structure ofmulti-layer substrates according to the present invention can reduce thepackage volume of the whole system for increasing the packageintegration and further provide a flexible package for application of aflexible electronic system. Comparing to prior arts, the presentinvention has high integration and high package integration ofSystem-In-Package either for the package among chip devices or forpackage among multi-layer substrates.

As is understood by a person skilled in the art, the foregoing preferredembodiments of the present invention are illustrative rather thanlimiting of the present invention. It is intended that they covervarious modifications and similar arrangements be included within thespirit and scope of the appended claims, the scope of which should beaccorded the broadest interpretation so as to encompass all suchmodifications and similar structure.

1. A manufacture method of a hybrid structure of multi-layer substrates,the manufacture method comprising steps of: a. providing a device waferincluding a plurality of chip devices; b. implementing an interfaceadhesion enhancing process on the chip devices to increase adhesionintensity on surfaces of the chip devices and then coating a dielectriclayer; c. forming a plurality of VIAs at the dielectric layer and ametal layer on the dielectric layer; d. coating another dielectriclayer; e. repeating the step c and the step d to form the multi-layersubstrates; f. dividing the chip devices and corresponding multi-layersubstrates along edges of the border districts; g. removing parts of thedevice wafer without chip devices; h. removing a border district of thedielectric layer to reveal a border district of the corresponding metallayer of the dielectric layer; i. separating a border district of atleast one metal layer connecting with a border district of thecorresponding dielectric layer from adjacent metal layers and adjacentdielectric layers for each multi-layer substrate; and j. connectingelectric conductor in a VIA of a first metal layer of one multi-layersubstrate with a separated border district of a metal layer of anothermulti-layer substrate to complete the hybrid structure of multi-layersubstrates.
 2. The manufacture method of claim 1, further comprising astep of implementing an interface adhesion enhancing process on restsurface of the dielectric layer and the metal layer except the borderdistrict thereof to increase adhesion intensity on the rest surfacebefore coating the another dielectric layer during the step d.
 3. Themanufacture method of claim 1, further comprising a step of implementingan interface adhesion weakening process on the border district todecrease adhesion intensity thereon before coating the anotherdielectric layer during the step d.
 4. The manufacture method of claim1, further comprising a step of connecting the multi-layer substrateswith a third substrate after the connecting step.